Measurement system, measurement method, and plasma processing device

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United States of America

PATENT NO 12211676
APP PUB NO 20230062662A1
SERIAL NO

17760182

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Abstract

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A measurement system including an imaging device and a plasma processing device having a plasma generator configured to generate plasma from a gas supplied into a processing chamber and a controller. The imaging device is configured to generate optical information of the plasma from image data of imaged plasma in the processing chamber, and the controller is configured to convert the generated optical information of the plasma into a plasma parameter that determines physical characteristics of the plasma with reference to a storage that stores correlation information between the optical information of the plasma and measurement results of the plasma parameter.

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Patent Owner(s)

  • TOKYO ELECTRON LIMITED

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kubo, Atsushi Tokyo, JP 91 657
Matsui, Hidefumi Yamanashi, JP 20 143
Suzuki, Ayuta Yamanashi, JP 13 21

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