Actuator assemblies comprising piezo actuators or electrostrictive actuators

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12210294
APP PUB NO 20220326627A1
SERIAL NO

17608760

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Abstract

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An actuator assembly including a first piezo actuator and a second piezo actuator. The piezo actuator has a correction unit configured to determine an output voltage difference representing a difference between a voltage at the output terminal of the first piezo actuator and a voltage at the output terminal of the second piezo actuator, and a first power correction for correcting the first power signal and/or a second power correction for correcting the second power signal, based on the output voltage difference.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VP O BOX 324 VELDHOVEN 5500 AH

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Butler, Hans Best, NL 166 2708
Jansen, Bas Den Bosch, NL 10 3

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