Electroconductive-film-coated substrate and reflective mask blank

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12210279
APP PUB NO 20220390825A1
SERIAL NO

17664682

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Abstract

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An electroconductive-film-coated substrate includes a glass substrate and an electroconductive film disposed on one main surface of the glass substrate. The electroconductive film has an inclined portion in a peripheral edge. A distance from a position in the inclined portion where a thickness of the electroconductive film is 10% of a film thickness of a center of the electroconductive film to an edge end of the glass substrate is 3.00 mm or less. A distance from an end of the inclined portion to the edge end of the glass substrate is longer than 0.00 mm.

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Patent Owner(s)

  • AGC INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Miyagi, Takahira Fukushima, JP 13 226
Mizoguchi, Masayoshi Fukushima, JP 3 1
Morita, Ryusuke Fukushima, JP 5 26
Nakamura, Sotaro Tokyo, JP 3 4
Tomizawa, Takeshi Fukushima, JP 132 1430

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