Concentration control using a bubbler

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12209310
APP PUB NO 20230257878A1
SERIAL NO

18001587

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Abstract

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The present disclosure relates, in part, to an apparatus for controlling the concentration of a component within a gas mixture. In particular embodiments, the component is a vaporized liquid component, such as a vaporized stabilizer or a vaporized precursor. Also described are systems thereof and methods for such control.

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Patent Owner(s)

Patent OwnerAddress
LAM RESEARCH CORPORATION4650 CUSHING PARKWAY FREMONT CA 94538

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Altecor, Aleksey V Newberg, US 4 0
Borth, Andrew Newberg, US 8 2
Chandrasekharan, Ramesh Lake Oswego, US 84 4837
Pohl, Erica Sakura Strandberg Golden, US 1 0
Srinivasan, Easwar Portland, US 42 3866

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