Zone-controlled rare-earth oxide ALD and CVD coatings

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12209307
APP PUB NO 20190382888A1
SERIAL NO

16546900

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Abstract

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Disclosed herein is a rare-earth oxide coating on a surface of an article with one or more interruption layers to control crystal growth and methods of its formation. The coating may be deposited by atomic layer deposition and/or by chemical vapor deposition. The rare-earth oxides in the coatings disclosed herein may have an atomic crystalline phase that is different from the atomic crystalline phase or the amorphous phase of the one or more interruption layers.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Rice, Michael R Pleasanton, US 176 3831
Sun, Jennifer Y Mountain View, US 261 13472
Wu, Xiaowei San Jose, US 87 1823

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