Glass substrate for EUVL, manufacturing method thereof, mask blank for EUVL, and manufacturing method thereof
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United States of America
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Jan 28, 2025
Grant Date -
Nov 18, 2021
app pub date -
Apr 30, 2021
filing date -
Apr 30, 2021
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Abstract
A glass substrate for EUVL includes a first main surface having a rectangular shape; a second main surface having a rectangular shape on an opposite side to the first main surface; four end surfaces orthogonal to the first and second main surfaces; four first chamfered surfaces formed on boundaries between the first main surface and the end surfaces; and four second chamfered surfaces formed on boundaries between the second main surface and the end surfaces. The glass substrate for EUVL is formed of quartz glass containing TiO2. The end surfaces include fluorine (F) and an element (A) other than fluorine that forms a gas cluster with fluorine, and satisfy relations:
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