Methods for producing nanoscale patterns, nano-fluidic devices, and nanogap electrochemical devices

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United States of America

PATENT NO 12209016
APP PUB NO 20220332570A1
SERIAL NO

17640890

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Abstract

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A method for manufacturing a soft stamp includes providing a substrate having a first electrode and a second electrode, the second electrode being formed at a distance less than 100 nm from the first electrode so that a nanogap Ng is formed between the first and second electrodes; pouring a curable substance over the first and second electrodes and into the nanogap Ng; curing the curable substance to form a soft stamp; and removing the soft stamp from the first and second electrodes. The soft stamp has a nano-feature having a size less than 100 nm.

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Patent Owner(s)

Patent OwnerAddress
KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY4700 KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY THUWAL 23955-6900

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Anthopoulos, Thomas D Thuwal, SA 4 13
Buttner, Ulrich Thuwal, SA 7 6
Faber, Hendrik Andreas Thuwal, SA 2 0
Loganathan, Kalaivanan Thuwal, SA 2 0
Yengel, Emre Thuwal, SA 2 0

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