Hybrid driving for large aperture tilting mirrors

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12209011
APP PUB NO 20230008705A1
SERIAL NO

17369829

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A microelectromechanical system MEMS structure is described. A first actuator is attached to a substrate and configured to rotate the substrate along a first axis of rotation. An array of rotatable MEMS mirrors is mounted on the substrate, aligned parallel to the first axis of rotation. Each rotatable MEMS mirror is rotatable about a second axis of rotation with each second axis of rotation being perpendicular to the first axis of rotation and parallel to every other axis of rotation. An array of second actuators is configured to rotate each of the rotatable MEMS mirrors about its corresponding second axis of rotation. A controller is configured to control the first actuator to rotate the substrate about the first axis of rotation. The controller further controls the array of second actuators to rotate each rotatable MEMS mirror of the array of rotatable MEMS mirrors about its corresponding second axis of rotation.

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Patent Owner(s)

  • BEIJING VOYAGER TECHNOLOGY CO., LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Wang, Youmin Mountain View, US 181 189
Zhou, Qin Livermore, US 97 364

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