MEMS actuator for in-plane movement of a mobile mass and optical module comprising the MEMS actuator

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12209008
APP PUB NO 20220380199A1
SERIAL NO

17752016

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Abstract

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A MEMS actuator includes a mobile mass suspended over a substrate in a first direction and extending in a plane that defines a second direction and a third direction perpendicular thereto. Elastic elements arranged between the substrate and the mobile mass have a first compliance in a direction parallel to the first direction that is lower than a second compliance in a direction parallel to the second direction. Piezoelectric actuation structures have a portion fixed with respect to the substrate and a portion that deforms in the first direction in response to an actuation voltage. Movement-transformation structures coupled to the piezoelectric actuation structures include an elastic movement-conversion structure arranged between the piezoelectric actuation structures and the mobile mass. The elastic movement-conversion structure is compliant in a plane formed by the first and second directions and has first and second principal axes of inertia transverse to the first and second directions.

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Patent Owner(s)

Patent OwnerAddress
STMICROELECTRONICS S R L20041 AGRATE BRIANZA (MILANO)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Boni, Nicolo' Mountain View, US 32 18
Carminati, Roberto Piancogno, IT 67 148
Gattere, Gabriele Castronno, IT 52 66
Riani, Manuel Como, IT 7 0

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