3D nanochannel interleaved devices

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12208386
APP PUB NO 20230390763A1
SERIAL NO

18234004

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Abstract

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3D nanochannel interleaved devices for molecular manipulation are provided. In one aspect, a method of forming a device includes: forming a pattern on a substrate of alternating mandrels and spacers alongside the mandrels; selectively removing the mandrels from a front portion of the pattern forming gaps between the spacers; selectively removing the spacers from a back portion of the pattern forming gaps between the mandrels; filling i) the gaps between the spacers with a conductor to form first electrodes and ii) the gaps between the mandrels with the conductor to form second electrodes; and etching the mandrels and the spacers in a central portion of the pattern to form a channel (e.g., a nanochannel) between the first electrodes and the second electrodes, wherein the first electrodes and the second electrodes are offset from one another across the channel, i.e., interleaved. A device formed by the method is also provided.

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Patent Owner(s)

Patent OwnerAddress
INTERNATIONAL BUSINESS MACHINES CORPORATIONNEW ORCHARD ROAD ARMONK NY 10504

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Canaperi, Donald Bridgewater, US 14 57
Cheng, Kangguo Schenectady, US 3099 32749
Clevenger, Lawrence A Saratoga Springs, US 787 5051
Fetterolf, Shawn Peter Cornwall, US 7 2

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