Method for manufacturing vibrator device

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United States of America Patent

PATENT NO 12207557
APP PUB NO 20230020694A1
SERIAL NO

17865052

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Abstract

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A method for manufacturing a vibrator device includes a first dry etching step of dry-etching a quartz crystal substrate having a first surface and a second surface from the side facing the first surface to form first grooves and part of the outer shapes of a first vibrating arm and a second vibrating arm, a second dry etching step of dry-etching the quartz crystal substrate from the side facing the second surface to form second grooves and part of the outer shapes of the first vibrating arm and the second vibrating arm, and thereafter, a wet etching step of wet-etching the side surfaces of the first vibrating arm and the second vibrating arm.

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Patent Owner(s)

Patent OwnerAddress
SEIKO EPSON CORPORATIONTOKYO 160-8801

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kobayashi, Takuro Minowa-machi, JP 17 7
Nishizawa, Ryuta Nagano, JP 103 299
Sakata, Hiyori Minowa-machi, JP 15 0
Shiraishi, Shigeru Ina, JP 23 3
Yamaguchi, Keiichi Ina, JP 131 865

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