Method and apparatus for plasma ignition in toroidal plasma sources

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United States of America Patent

PATENT NO 12207385
APP PUB NO 20240284584A1
SERIAL NO

18112712

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Abstract

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A plasma apparatus of a plasma processing system is provided. The plasma apparatus defines a toroidal plasma channel and includes multiple end blocks defining respective portions of the toroidal plasma channel. Each end block includes an end-block tube constructed from a first electrically conductive material and a dielectric coating disposed on an interior surface of the end-block tube. The plasma apparatus also includes multiple mid-blocks defining respective portions of the toroidal plasma channel. Each mid-block includes at least one heat sink located adjacent to a substantially linear tube with a thermal interface disposed therebetween. The thermal interface is in physical communication with the tube and the at least one heat sink. The mid-block tube has a substantially uniform wall thickness and is constructed from a dielectric material. The at least one heat sink is constructed from a second electrically conductive material.

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Patent Owner(s)

Patent OwnerAddress
MKS INSTRUMENTS INC2 TECH DRIVE SUITE 201 ANDOVER MA 01810

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Desjardins, Joseph Bedford, US 3 47
Harris, Michael Hudson, US 176 5537
Hill, Gordon Arlington, US 28 587
Pokidov, Ilya Winchester, US 17 93
Tai, Chiu-Ying Chelmsford, US 13 39

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