Sample holder

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United States of America Patent

PATENT NO 12205839
APP PUB NO 20220148901A1
SERIAL NO

17429367

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A sample holder includes an insulating substrate, a heat element, a support member, and a bond. The insulating substrate is a ceramic member having a first surface and a second surface opposite to the first surface. The heat element is on the second surface of the insulating substrate. The second surface of the insulating substrate includes a first portion where the heat element is located, a second portion surrounding the first portion, and a groove between the first portion and the second portion. A surface roughness of the first portion is greater than a surface roughness of the second portion.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
KYOCERA CORPORATIONKYOTO-SHI KYOTO 612-8501

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Narazaki, Yoshinori Kirishima, JP 2 0

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