Device and method for moving an object into a processing station, conveying system and processing apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Jan 21, 2025
Grant Date -
Oct 20, 2022
app pub date -
Jun 24, 2020
filing date -
Jun 26, 2019
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A device for moving an object including a substrate through an open side of a processing station of a processing apparatus including a support, placeable at the processing station. The device includes a carrier, guided for movement relative to the support along a path predominantly directed in parallel to a reference axis in a reference co-ordinate system. The device includes a device for controlling movement of the carrier and driving the movement in an opposite direction along the path. The device includes a component for holding the object and a suspension mechanism with which the holding component is connected to the carrier. The suspension mechanism is arranged to guide movement of the holding component relative to the carrier along a holding component path. The device is arranged to drive the movement of the holding component along the holding component path. The holding component path is predominantly directed parallel to the reference axis.
First Claim
Other Claims data not available
Family
International Classification(s)
- 2020 Application Filing Year
- H01L Class
- 29783 Applications Filed
- 21134 Patents Issued To-Date
- 70.96 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- H01L Class
- 0 % this patent is cited more than
- < 1 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Jul 21, 2028 |
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Jul 21, 2032 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jul 21, 2036 |