Deposition of organic films

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United States of America Patent

PATENT NO 12205820
APP PUB NO 20230011277A1
SERIAL NO

17808741

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Processes are provided herein for deposition of organic films. Organic films can be deposited, including selective deposition on one surface of a substrate relative to a second surface of the substrate. For example, polymer films may be selectively deposited on a first metallic surface relative to a second dielectric surface. Selectivity, as measured by relative thicknesses on the different layers, of above about 50% or even about 90% is achieved. The selectively deposited organic film may be subjected to an etch process to render the process completely selective. Processes are also provided for particular organic film materials, independent of selectivity.

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Patent Owner(s)

  • ASM IP HOLDING B.V.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Haukka, Suvi P Helsinki, FI 104 17903
Pore, Viljami J Helsinki, FI 66 9755
Sharma, Varun Helsinki, FI 103 2735
Suemori, Hidemi Helsinki, FI 32 3117
Tois, Eva E Espoo, FI 40 2593

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