Supercontinuum radiation source and associated metrology devices

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 12204229
APP PUB NO 20240061314A1
SERIAL NO

18373421

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Abstract

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A supercontinuum radiation source including a modulator being operable to modulate pump laser radiation including a train of radiation pulses to provide modulated pump laser radiation, the modulation being such to selectively provide a burst of the pulses; and a hollow-core photonic crystal fiber being operable to receive the modulated pump laser radiation and excite a working medium contained within the hollow-core photonic crystal fiber so as to generate supercontinuum radiation.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VP O BOX 324 VELDHOVEN 5500 AH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bauerschmidt, Sebastian Thomas Wendelstein, DE 29 88
Götz, Peter Maximilian Altdorf, DE 16 43
Uebel, Patrick Sebastian Marloffstein, DE 39 111

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