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United States of America Patent

PATENT NO 12203168
APP PUB NO 20220290300A1
SERIAL NO

17638599

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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Various showerheads and methods are provided. A showerhead may include a faceplate partially defined by a front surface and a back surface, a back plate having a gas inlet, a first conical frustum surface, and a second conical frustum surface, a plenum volume fluidically connected to the gas inlet and at least partially defined by the gas inlet, the back surface of the faceplate, the first conical frustum surface, and the second conical frustum surface, and a baffle plate positioned within the plenum volume, and having a plurality of baffle plate through-holes extending through the baffle plate. The second conical frustum surface may be positioned radially outwards from the first conical frustum surface with respect to a center axis of the showerhead, and the second conical frustum surface may be positioned along the center axis farther from the gas inlet than the first conical frustum surface.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
LAM RESEARCH CORPORATION4650 CUSHING PARKWAY FREMONT CA 94538

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Butail, Gorun Fremont, US 16 1151
Chen, Yen-Chang Taipei, TW 37 135
Danek, Michal Cupertino, US 118 10162
Gopinath, Sanjay Fremont, US 37 2199
Gulabal, Vinayakaraddy Yadgir, IN 10 3
Lenz, Eric H Livermore, US 59 4210
Majumder, Prodyut Milpitas, US 2 1
Thombare, Shruti Vivek Sunnyvale, US 19 937
Tjokro, Novy Union City, US 8 36
van, Cleemput Patrick A Duvall, US 57 4102
Vellanki, Ravi San Jose, US 13 72

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