Equipment front end module
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United States of America Patent
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Jan 21, 2025
Grant Date -
Nov 3, 2022
app pub date -
Apr 27, 2022
filing date -
Apr 28, 2021
priority date (Note) -
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status (Latency Note)
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Abstract
An EFEM includes a circulation path including a transfer chamber configured to form a transfer space where a substrate is transferred and a return path configured to return a gas flowing from one side to the other side of the transfer chamber, the EFEM including: a capture part provided in the return path and configured to electrically capture particles contained in the gas flowing through the return path, wherein the return path and the transfer chamber are provided such that a partition wall is interposed therebetween, and a differential pressure is generated on both sides of the partition wall such that a pressure on the side of the return path becomes higher than a pressure on the side of the transfer chamber in a state in which the gas circulates through the circulation path.
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