Cluster tool for production-worthy fabrication of Dolan bridge quantum Josephson junction devices
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
-
Jan 14, 2025
Grant Date -
May 6, 2021
app pub date -
Nov 6, 2019
filing date -
Nov 6, 2019
priority date (Note) -
In Force
status (Latency Note)
Importance
|
US Family Size
|
Non-US Coverage
|
Abstract
A deposition system includes a deposition source and a scanning stage disposed within a deposition path of the deposition source. The scanning stage includes a support platform configured to support a wafer thereon, and a mechanical actuator coupled to the support platform. The mechanical actuator is configured to translate the support platform with respect to the deposition source. The deposition system includes a proximity mask disposed within the deposition path of the deposition source between the deposition source and the scanning stage, the proximity mask defining a slit. The deposition system includes a controller in communication with the scanning stage, the controller configured to control the mechanical actuator to translate the wafer with respect to the slit such that an angle of deposition remains substantially constant. In operation, the proximity mask prevents deposition source material having a trajectory that is out of alignment with the slit from contacting the wafer.
First Claim
Other Claims data not available
Family
- No Family data available.
International Classification(s)
- 2019 Application Filing Year
- C23C Class
- 2932 Applications Filed
- 1807 Patents Issued To-Date
- 61.64 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- C23C Class
- 0 % this patent is cited more than
- < 1 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 3.5 Year Payment | $1600.00 | $800.00 | $400.00 | Jul 14, 2028 |
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Jul 14, 2032 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Jul 14, 2036 |