Spin-orbit torque MRAM structure and manufacture thereof

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12201030
APP PUB NO 20230389441A1
SERIAL NO

18231414

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Abstract

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Embodiments of the present disclosure generally include spin-orbit torque magnetoresistive random-access memory (SOT-MRAM) devices and methods of manufacture thereof. The SOT-MRAM devices described herein include an SOT layer laterally aligned with a magnetic tunnel junction (MTJ) stack and formed over a trench in an interconnect. Thus, the presence of the SOT layer outside the area of the MTJ stack is eliminated, and electric current passes from the interconnect to the SOT layer by SOT-interconnect overlap. The devices and methods described herein reduce the formation of shunting current and enable the MTJ to self-align with the SOT layer in a single etching process.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ahn, Jaesoo San Jose, US 29 305
Dai, Huixiong San Jose, US 60 1555
Kim, Jong Mun San Jose, US 35 1411
Ngai, Christopher S Burlingame, US 33 2515
Pakala, Mahendra Santa Clara, US 81 5275
Park, Chando Palo Alto, US 67 1714
Patel, Sahil Sunnyvale, US 48 248
Wang, Wenhui San Jose, US 49 316
Xue, Lin San Diego, US 35 233
Ying, Chentsau Chris Cupertino, US 14 19
Yu, Minrui Santa Clara, US 17 122

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