Physical vapor deposition of piezoelectric films

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12201025
APP PUB NO 20230032638A1
SERIAL NO

17967556

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Abstract

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A physical vapor deposition system includes a deposition chamber, a support to hold a substrate in the deposition chamber, a target in the chamber, a power supply configured to apply power to the target to generate a plasma in the chamber to sputter material from the target onto the substrate to form a piezoelectric layer on the substrate, and a controller configured to cause the power supply to alternate between deposition phases in which the power supply applies power to the target and cooling phases in which power supply does not apply power to the target. Each deposition phase lasts at least 30 seconds and each cooling phase lasts at least 30 seconds.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SAN FRANCISCO CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kadam, Ankur Maharashtra, IN 24 679
Ramakrishnan, Bharatwaj San Jose, US 12 44
Sangle, Abhijeet Laxman Maharashtra, IN 11 5
Sharma, Vijay Bhan Rajasthan, IN 13 33
Sivaramakrishnan, Visweswaren Cupertino, US 114 5314
Xue, Yuan Xi'an, CN 52 151

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