Two probe low profile tuner
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United States of America
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Jan 14, 2025
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N/A
app pub date -
Nov 5, 2022
filing date -
Nov 5, 2022
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Abstract
A low profile two probe load-pull slide screw impedance tuner uses two tuning probes sharing the same slabline; they are inserted diametrically at fixed depth (distance from the center conductor) from both sides into the channel and move only horizontally along the slabline. The tuner does not have adjustable vertical axes controlling the penetration of the probes and its low profile is optimized for on-wafer operations. The carriages holding the probes are moved at high speed along the slabline using linear electric actuators. The “S” shaped center conductor allows for a neutral zero 50 Ohm state. An efficient de-embedding calibration method serves speeding up the measurement procedure additionally.
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