Surface acoustic wave device and manufacturing method thereof

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12199587
APP PUB NO 20210211114A1
SERIAL NO

17140249

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Abstract

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A surface acoustic wave (SAW) device according to the present invention includes: a substrate; an intermediate layer formed on an upper surface of the substrate; a piezoelectric layer formed on an upper surface of the intermediate layer; and an inter-digital transducer (IDT) electrode formed on an upper surface of the piezoelectric layer to generate a SAW, wherein an upper portion of the substrate is deformed by a predetermined thickness by ion implantation to form an ion trap layer and the intermediate layer is formed on an upper surface of the ion trap layer.

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Patent Owner(s)

Patent OwnerAddress
WISOL CO LTD531-7 GAJANG-RO OSAN-SI GYEONGGI-DO OSAN-SI 18103

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kim, Tae Hyun Gyeonggi-do, KR 303 1200
Lee, Chul Hwa Gyeonggi-do, KR 5 10
Lee, Hun Yong Gyeonggi-do, KR 10 3
Yoshikazu, Kihara Gyeonggi-do, KR 1 0

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