Substrate processing apparatus

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12198971
APP PUB NO 20240213077A1
SERIAL NO

18069478

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Importance

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Abstract

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There is provided a substrate processing apparatus. The substrate processing apparatus may include a substrate supporter supporting a substrate, a processing solution feeder supplying a processing solution to the substrate, first and second recovery containers configured to recover the processing solution, a first pipe connected to the first recovery container and including an insulating material, a second pipe connected to the second recovery container and including an insulating material, a first static electricity eliminator in contact with the first pipe, a second static electricity eliminator in contact with the second pipe, and a plurality of first conductive lines connected to the first and second static electricity eliminators.

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Patent Owner(s)

Patent OwnerAddress
SEMES CO LTDSOUTH KOREA CHUNGNAM CHEONAN CITY NORTHWEST JISHAN CITY FOUR FIVE STREET NO 77 CHEONAN JEOLLANAM-DO

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chung, Woojin Seongnam-si, KR 12 92
Kim, Kyungmo Asan-si, KR 11 6
Lee, Jeongcheol Incheon-si, KR 1 0
Min, Myunggeun Cheonan-si, KR 1 0
Nam, Jungheum Gyeongju-si, KR 1 0

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