Vapor delivery head for preventing stiction of high aspect ratio structures and/or repairing high aspect ratio structures

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12198945
APP PUB NO 20210366738A1
SERIAL NO

17269609

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A vapor delivery head for wet treatment of a substrate includes a body including an upper surface, a lower surface, an upper plenum and a lower plenum. A first bore is arranged on the upper surface of the body and fluidly connected to the upper plenum to supply heated fluid. A second bore is arranged on the upper surface of the body and connected to the upper plenum to remove heated fluid. A third bore is arranged on the upper surface of the body and connected to the lower plenum to receive a gas mixture. A plurality of through holes through the lower surface of the body are in fluid communication with the lower plenum.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
LAM RESEARCH AGSEZ-STRASSE 1 VILLACH A-9500

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bandarapu, Bhaskar Villach, AT 7 6
Berney, Butch Pleasanton, US 15 1553
Hohenwarter, Karl-Heinz Dellach/Gail, AT 16 534
Johnson, Robert San Jose, US 196 3200
Klemm, Michael Villach, AT 7 6
Lavdovsky, Nathan Beaverton, US 6 13
Loidl, Bernhard Villach, AT 6 9
Mui, David Fremont, US 63 1977
Putzi, Christian Rosenbach, AT 6 38
Si, Hongbo Santa Clara, US 201 2250

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