Negative photosensitive resin composition, patterning process, method for forming cured film, interlayer insulation film, surface protective film, and electronic component

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United States of America

PATENT NO 12197127
APP PUB NO 20220317570A1
SERIAL NO

17674120

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Abstract

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A negative photosensitive resin composition including: an alkali-soluble resin containing at least one structure selected from a polyimide structure, a polyamide structure, a polybenzoxazole structure, a polyamide-imide structure, and a precursor structure thereof, a polymer compound having a structural unit formed by cyclopolymerization, a compound that generates an acid by light, and a heat crosslinking agent.

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Patent Owner(s)

Patent OwnerAddress
SHIN-ETSU CHEMICAL CO LTDCHIYODA-KU TOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Iio, Masashi Joetsu, JP 41 172
Takemura, Katsuya Joetsu, JP 94 929
Urano, Hiroyuki Joetsu, JP 34 169
Watanabe, Osamu Joetsu, JP 350 4382

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