Nanostamping method and nano-optical component
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United States of America
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Jan 14, 2025
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Mar 17, 2022
app pub date -
Jan 16, 2020
filing date -
Jan 16, 2020
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Abstract
In an embodiment a nanostamping method includes forming a nanostructure in a layer of optical embossing material on a first carrier substrate by a forming stamp having a nano-relief, wherein the nanostructure comprises a plurality of nano-elevations which are connected via an embossing material base, generating a coated nanostructure by covering the nano-elevations with a filler material layer, wherein the filler material layer and the optical embossing material comprise different refractive indices, applying a second carrier substrate on the coated nanostructure, detaching the first carrier substrate and removing a material of the embossing material base.
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