Patterning device and method of use thereof

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12197120
APP PUB NO 20220121105A1
SERIAL NO

17426806

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Abstract

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An attenuated phase shift patterning device including a first component for reflecting radiation, and a second component for reflecting radiation with a different phase with respect to the radiation reflected from the first component, the second component covering at least a portion of the surface of the first component such that a pattern including at least one uncovered portion of the first component is formed for generating a patterned radiation beam in a lithographic apparatus in use, wherein the second component includes a material having a refractive index with a real part (n) being less than 0.95 and an imaginary part (k) being less than 0.04.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VP O BOX 324 VELDHOVEN 5500 AH

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Finders, Jozef Maria Veldhoven, NL 60 1059
McNamara, John Martin Veldhoven, NL 4 11
Timmermans, Frank Jan Eindhoven, NL 4 2
Van, Lare Marie-Claire Utrecht, NL 11 10
Wittebrood, Friso Cuijk, NL 2 8

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