Probe assembly with multiple spacers and methods of assembling the same
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United States of America
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Jan 14, 2025
Grant Date -
Feb 9, 2023
app pub date -
Jan 10, 2022
filing date -
Jan 10, 2022
priority date (Note) -
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status (Latency Note)
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Abstract
A probe assembly includes a multilayer structure including probe contact pads, an upper guide plate including an array of upper holes therethrough, a lower guide plate including an array of lower holes therethrough, a vertical stack of a plurality of dielectric spacer plates located between the upper guide plate and the lower guide plate and including a respective opening therethrough, and an array of probes attached to the probe contact pads, vertically extending through the array of upper holes and the array of lower holes, and vertically extending through the openings through the vertical stack of the plurality of dielectric spacer plates.
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