Measuring device and optical fiber strain measuring jig thereof
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
-
Jan 14, 2025
Grant Date -
Aug 4, 2022
app pub date -
Jan 27, 2022
filing date -
Jan 27, 2022
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A measuring device and an optical fiber strain measuring jig thereof appropriately measure an attraction force distribution on a wafer held by an electrostatic chuck. The measuring jig includes a substrate configured to be held by the electrostatic chuck; and an optical fiber including therein reflection elements capable of reflecting light having a wavelength corresponding to strain of the substrate due to stress, and fixed to one surface of the substrate in a state in which the reflection elements are disposed at plural positions, respectively, on the one surface of the substrate.
First Claim
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International Classification(s)
- 2022 Application Filing Year
- H01J Class
- 2261 Applications Filed
- 741 Patents Issued To-Date
- 32.78 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- H01J Class
- 0 % this patent is cited more than
- < 1 Age
Maintenance Fees
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