Adaptive baking method

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12196491
APP PUB NO 20220074668A1
SERIAL NO

17527991

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Abstract

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A controller includes a non-transitory computer readable medium configured to store information related to a target temperature of a wafer, a target temperature of a heating element, a temperature of the wafer, and a temperature of the heating element. The controller further includes a processor connected to the non-transitory computer readable medium, the processor configured to generate at least one heating signal during a baking process to adjust a duration of an entirety of the baking process in response to the temperature of the wafer and the temperature of the heating element.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTDHSIN-CHU 300-77

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hwang, Ho-Yung David Hsinchu, TW 46 361
Lee, Heng-Jen Hsinchu, TW 34 632
Wu, Tzung-Chen Hsinchu, TW 6 2
Zhou, Wen-Zhan Hsinchu, TW 16 365

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