Substrate processing apparatus with an injector

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12195852
APP PUB NO 20220162751A1
SERIAL NO

17530161

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A substrate processing apparatus having a tube, a closed liner lining the interior surface of the tube, a plurality of gas injectors to provide a gas to an inner space of the liner, and, a gas exhaust duct to remove gas from the inner space is disclosed. The liner may have a substantially cylindrical wall delimited by a liner opening at a lower end and being substantially closed for gases above the liner opening. The apparatus may have a boat constructed and arranged moveable into the inner space via the liner opening and provided with a plurality of substrate holders for holding a plurality of substrates over a substrate support length in the inner space. Each of the gas injectors may have a single exit opening at the top and the exit openings of the plurality of injectors are substantially equally divided over the substrate support length.

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Patent Owner(s)

Patent OwnerAddress
ASM IP HOLDING B VVERSTERKERSTRAAT 8 ALMERE 1322 AP

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
de, Ridder Chris G M Hoogland, NL 19 867
Haanstra, Kornelius Nijeveen, NL 6 1523
Jdira, Lucian C Nieuw Vennep, NL 12 1688
Knaepen, Werner Leuven, BE 45 6955
Roelofs, Robin Utrecht, NL 7 435
Terhorst, Herbert Amersfoort, NL 46 6711

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