Piezoelectric micromachined ultrasonic transducer having a polymeric member over a damper cavity
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United States of America
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Jan 14, 2025
Grant Date -
Apr 21, 2022
app pub date -
Oct 8, 2021
filing date -
Oct 8, 2021
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Abstract
A PMUT device includes a membrane element adapted to generate and receive ultrasonic waves by oscillating, about an equilibrium position, at a corresponding resonance frequency. A piezoelectric element is located over the membrane element along a first direction and configured to cause the membrane element to oscillate when electric signals are applied to the piezoelectric element, and generate electric signals in response to oscillations of the membrane element. A damper is configured to reduce free oscillations of the membrane element, and the damper includes a damper cavity surrounding the membrane element, and a polymeric member having at least a portion over the damper cavity along the first direction.
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