Cathode exchange mechanism to improve preventative maintenance time for cluster system
Number of patents in Portfolio can not be more than 2000
United States of America
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Jan 14, 2025
Grant Date -
Aug 4, 2022
app pub date -
Feb 2, 2021
filing date -
Feb 2, 2021
priority date (Note) -
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status (Latency Note)
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Abstract
A method and apparatus for lifting a process station from a processing module is described herein. The apparatus includes a lift assembly disposed on the processing module, a lift cage, and one or more guide pins. The lift assembly is disposed to be capable of reaching each of the process stations disposed within the processing module. The lift assembly is used for replacement and maintenance of the process stations and further enables the automated removal and placement of the process stations within the processing module. Maintenance methods enabled by the lift assembly are additionally disclosed herein.
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