Apparatus and method for generating extreme ultraviolet radiation

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12193136
APP PUB NO 20230363074A1
SERIAL NO

18224005

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Abstract

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A target droplet source for an extreme ultraviolet (EUV) source includes a droplet generator configured to generate target droplets of a given material. The droplet generator includes a nozzle configured to supply the target droplets in a space enclosed by a chamber. The target droplet source further includes a sleeve disposed in the chamber distal to the nozzle. The sleeve is configured to provide a path for the target droplets in the chamber.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING CO LTDSCIENCE-BASED INDUSTRIAL PARK HSIN-CHU 300-77

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Han-Lung Kaohsiung, TW 59 87
Chen, Li-Jui Hsinchu, TW 306 606
Cheng, Po-Chung Chiayi County, TW 162 297
Chien, Shang-Chieh New Taipei, TW 193 696
Lai, Wei-Chih Changhua County, TW 45 146
Liu, Bo-Tsun Taipei, TW 58 128
Yang, Chi Tainan, TW 80 153

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