Area scaling for VTFET contacts

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12191388
APP PUB NO 20230145135A1
SERIAL NO

17520812

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Abstract

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Techniques for area scaling of contacts in VTFET devices are provided. In one aspect, a VTFET device includes: a fin(s); a bottom source/drain region at a base of the fin(s); a gate stack alongside the fin(s); a top source/drain region present at a top of the fin(s); a bottom source/drain contact to the bottom source/drain region; and a gate contact to the gate stack, wherein the bottom source drain and gate contacts each includes a top portion having a width W1CONTACT over a bottom portion having a width W2CONTACT, wherein W2CONTACTCONTACT, and wherein a sidewall along the top portion is discontinuous with a sidewall along the bottom portion. The bottom portion having the width W2CONTACT is present alongside the gate stack and the top source/drain region. A method of forming a VTFET device is also provided.

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Patent Owner(s)

  • IBM CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fan, Su Chen Cohoes, US 138 779
Guo, Jing Niskayuna, US 159 278
Mignot, Yann Slingerlands, US 128 357
Zou, Lijuan Slingerlands, US 21 89

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