Low resistivity tungsten film and method of manufacture

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12191198
APP PUB NO 20220068709A1
SERIAL NO

17002220

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Abstract

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Apparatus and methods to provide electronic devices comprising tungsten film stacks are provided. A tungsten liner formed by physical vapor deposition is filled with a tungsten film formed by chemical vapor deposition directly over the tungsten liner.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cen, Xi San Jose, US 25 475
Chen, Zhebo San Jose, US 55 441
Lee, Joung Joo San Jose, US 70 504
Lei, Wei Campbell, US 68 1081
Wang, Feihu San Jose, US 14 18
Wu, Kai Palo Alto, US 492 3966
Yuan, Zhibo Santa Clara, US 3 0
Zhou, Chunming Fremont, US 12 34

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