Dual arm with opposed dual end effectors and no vertical wafer overlap
Number of patents in Portfolio can not be more than 2000
United States of America
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Jan 7, 2025
Grant Date -
Apr 22, 2021
app pub date -
Oct 15, 2020
filing date -
Oct 15, 2020
priority date (Note) -
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Abstract
An apparatus including a drive; and a movable arm assembly connected to the drive. The movable arm assembly includes a first arm and a second arm, where the first arm includes a first upper arm, a first forearm and a first end effector, and where the second arm includes a second upper arm, a second forearm and a second end effector. The first end effector includes at least two first substrate holding areas. The second end effector includes at least two second substrate holding areas. The drive and the movable arm assembly are configured to prevent the movable arm assembly from passing over top sides of substrates located on the first and second substrate holding areas.
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