Actively clamped carrier assembly for processing tools

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12191186
APP PUB NO 20230352336A1
SERIAL NO

18338443

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Embodiments of the present disclosure are related to carrier assemblies that can clamp more than one optical device substrates and methods for forming the carrier assemblies. The carrier assembly includes a carrier, one or more substrates, and a mask. The carrier is magnetically coupled to the mask to retain the one or more substrates. The carrier assembly is used for supporting and transporting the one or more substrates during processing. The carrier assembly is also used for masking the one or more substrates during PVD processing. Methods for assembling the carrier assembly in a build chamber are described herein.

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Patent Owner(s)

  • APPLIED MATERIALS INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Riordon, Benjamin B Newburyport, US 39 494
Strassner, James D Austin, US 25 73

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