Vacuum wafer chuck for manufacturing semiconductor devices

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12191185
APP PUB NO 20220415699A1
SERIAL NO

17883589

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Disclosed is a vacuum chuck and a method for securing a warped semiconductor substrate during a semiconductor manufacturing process so as to improve its flatness during a semiconductor manufacturing process. For example, a semiconductor manufacturing system includes: a vacuum chuck configured to hold a substrate, wherein the vacuum chuck comprises, a plurality of vacuum grooves located on a top surface of the vacuum chuck, wherein the top surface is configured to face the substrate; and a plurality of flexible seal rings disposed on the vacuum chuck and extending outwardly from the top surface, wherein the plurality of flexible seal rings are configured to directly contact a bottom surface of the substrate and in adjacent to the plurality of vacuum grooves so as to form a vacuum seal between the substrate and the vacuum chuck, and wherein each of the plurality of flexible seal rings has a zigzag cross section.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Kuei-Sung Kaohsiung, TW 97 622
Cheng, Chun-Wen Zhubei, TW 259 3778
Chou, Chin-Lin Hsin-Chu, TW 3 0
Kuo, Shou-Wen Hsinchu, TW 49 75
Lee, Chien-Fa Hinchu, TW 25 41
Liu, Hsu-Shui Pingjhen, TW 92 836
Pai, Jiun-Rong Jhubei, TW 139 890
Tsai, Shang-Ying Pingzhen, TW 95 886

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Jul 7, 2028
7.5 Year Payment $3600.00 $1800.00 $900.00 Jul 7, 2032
11.5 Year Payment $7400.00 $3700.00 $1850.00 Jul 7, 2036
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00