Substrate processing apparatus, substrate processing system and substrate processing method
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United States of America
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Jan 7, 2025
Grant Date -
Sep 1, 2022
app pub date -
Jul 8, 2020
filing date -
Jul 8, 2020
priority date (Note) -
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status (Latency Note)
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Abstract
A substrate processing apparatus includes a pair of first substrate chucks each configured to hold a substrate from below while allowing a first main surface of the substrate to face upwards; a pair of second substrate chucks each configured to hold the substrate from below while allowing a second main surface of the substrate opposite to the first main surface to face upwards; a rotary table which is configured to be rotated about a rotation axis; a first processing unit equipped with a first processing tool configured to process the first main surface of the substrate held by the first substrate chuck; and a second processing unit equipped with a second processing tool configured to process the second main surface of the substrate held by the second substrate chuck.
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