Management method, measuring method, measuring device, crystal oscillator sensor, and set
Number of patents in Portfolio can not be more than 2000
United States of America
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Jan 7, 2025
Grant Date -
Oct 13, 2022
app pub date -
Jun 24, 2022
filing date -
Jun 24, 2022
priority date (Note) -
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Abstract
A management method of managing a purity of a chemical liquid containing an organic solvent by sensing impurities in the chemical liquid. The management method includes Step 1 of preparing a target chemical liquid containing an organic solvent; Step 2 of bringing the target chemical liquid into contact with a crystal oscillator sensor including an adsorption layer that adsorbs the impurities and a crystal oscillator and obtaining an amount of change in a resonance frequency of the crystal oscillator resulting from contact of the target chemical liquid; and Step 3 of managing the purity of the chemical liquid by comparing whether or not the obtained amount of change falls within a permissible range based on a preset purity of the target chemical liquid. In Step 2, at least a part of a liquid contact portion coming into contact with the target chemical liquid is made of a fluorine-based resin.
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