Systems and methods for verification and calibration using known reference chemical solutions
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United States of America
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Jan 7, 2025
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app pub date -
Nov 15, 2023
filing date -
Nov 15, 2023
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Abstract
A heat exchanger has a first inlet in fluid communication with a tank that contains a first chemical solution of a known concentration, and a second inlet in fluid communication with a conduit. The conduit is in fluid communication with a process tool and conveys a second chemical solution from the process tool to the second inlet. The heat exchanger receives a quantity of the first chemical solution via the first inlet and a quantity of the second chemical solution via the second inlet, and adjusts a temperature of the received quantity of the first chemical solution to bring the temperature of the received quantity of the first chemical solution toward a temperature of the received quantity of the second chemical solution. The temperature-adjusted first chemical solution can be selectively provided to an analytic flow cell for verification and/or calibration of the flow cell.
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