MEMS microphone

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12187597
APP PUB NO 20230192473A1
SERIAL NO

17833918

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A MEMS microphone includes a substrate, a base, a capacitance system, and at least one cantilever structure. The substrate includes a back cavity, the base is disposed on one side of the substrate, and the capacitance system is disposed on the base. The capacitance system includes at least one back plate assembly, at least one first vibration diaphragm, and at least one second vibration diaphragm. The at least one first vibration diaphragm includes a first sub-vibration diaphragm, and the at least one second vibration diaphragm includes a second sub-vibration diaphragm. The sub-vibration diaphragm and the second sub-vibration diaphragm form a cantilever beam structure on the base, which increase compliance of the at least one first vibration diaphragm and the at least one second vibration diaphragm and reduce tension of the at least one first vibration diaphragm and the at least one second vibration diaphragm, thereby improving sensitivity of the microphones.

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Patent Owner(s)

Patent OwnerAddress
AAC KAITAI TECHNOLOGIES (WUHAN) CO LTDTOWER A BUILDING EAST LAKE FREE TRADE ZONE NO 777 OPTICAL VALLEY 3TH RD WUHAN HUBEI CHINA WUHAN

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Wang, Kaijie Shenzhen, CN 16 3
Zhao, Zhuanzhuan Shenzhen, CN 18 3

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