Substrate cleaning line and substrate cleaning system comprising the same
Number of patents in Portfolio can not be more than 2000
United States of America
Stats
-
Jan 7, 2025
Grant Date -
Mar 2, 2023
app pub date -
Feb 14, 2022
filing date -
Feb 14, 2022
priority date (Note) -
In Force
status (Latency Note)
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Abstract
A substrate cleaning line and a substrate cleaning system including the same are disclosed. The substrate cleaning line may include a chamber portion including a plurality of cleaning chambers to clean a substrate, and a first return robot to load, unload, or transfer the substrate from or to the plurality of cleaning chambers, wherein the cleaning chambers may be stacked on each other in a vertical direction.
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Cited Art Landscape
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