High critical temperature metal nitride layer with oxide or oxynitride seed layer

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United States of America

PATENT NO 12185643
APP PUB NO 20230345846A1
SERIAL NO

18177096

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Abstract

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A superconducting device includes a substrate, a metal oxide or metal oxynitride seed layer on the substrate, and a metal nitride superconductive layer disposed directly on the seed layer. The seed layer is an oxide or oxynitride of a first metal, and the superconductive layer is a nitride of a different second metal.

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Patent Owner(s)

  • APPLIED MATERIALS INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cao, Yong San Jose, US 148 2023
Chen, Zhebo San Jose, US 55 441
Chowdhury, Mohammad Kamruzzaman Phoenix, US 15 64
Lavan, Shane San Jose, US 14 21
Mangipudi, Shriram Santa Clara, US 5 11
Patibandla, Nag B Pleasanton, US 159 2040
Yang, Zihao Santa Clara, US 33 62
Zhu, Mingwei San Jose, US 87 334

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