High-temperature substrate support assembly with failure protection

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12185433
APP PUB NO 20230377930A1
SERIAL NO

18197657

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Abstract

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A substrate support assembly includes a plate structure and an insulator structure. The plate structure includes an upper plate and a lower plate. The lower plate includes a lower plate structure surface. The insulator structure is disposed beneath the plate structure. The insulator structure includes a lower insulator structure surface and an upper insulator structure surface. A first portion of the upper insulator structure surface is recessed with respect to a second portion of the upper insulator structure surface. The first portion of the upper insulator structure surface forms an interior volume with the lower plate structure surface.

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Patent Owner(s)

  • APPLIED MATERIALS INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Goel, Ashish Bangalore, IN 72 890
Gupta, Suresh Union City, US 7 90
Koosau, Denis Martin Pleasanton, US 8 6
Perez-Guzman, Martin Milpitas, US 10 12

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