Transversely-excited film bulk acoustic resonator with a cavity having round end zones

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 12184261
APP PUB NO 20210281238A1
SERIAL NO

17330219

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Abstract

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Acoustic filters, resonators and methods are disclosed. An acoustic filter device includes a substrate having a surface and a single-crystal piezoelectric plate having front and back surfaces, the back surface attached to the surface of the substrate except for a portion of the piezoelectric plate forming a diaphragm that spans a cavity in the substrate. An interdigital transducer is formed on the front surface of the piezoelectric plate with interleaved fingers of the IDT disposed on the diaphragm. At least a portion of a perimeter of the cavity is curved and at least one end zone of the perimeter of the cavity is round.

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Patent Owner(s)

Patent OwnerAddress
MURATA MANUFACTURING CO LTDKYOTO JAPAN KYOTO

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Costa, James R Lompoc, US 16 112
Dyer, Greg Santa Barbara, US 48 158
Garcia, Bryant Belmont, US 127 2732
Hammond, Robert B Santa Barbara, US 72 1997
John, Jesson Dublin, US 26 1084
Kay, Andrew Provo, US 81 835
Plesski, Viktor Gorgier, CH 98 3449
Turner, Patrick San Bruno, US 141 3419
Yandrapalli, Soumya Lausanne, CH 38 1403
Yantchev, Ventsislav Sofia, BG 138 3509
Zhang, Kuan Goleta, US 12 43

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