Single-photon avalanche diodes with deep trench isolation

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United States of America

PATENT NO 12183754
APP PUB NO 20230065063A1
SERIAL NO

17410025

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Abstract

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Structures for a single-photon avalanche diode and methods of forming a structure for a single-photon avalanche diode. The structure includes a semiconductor layer having a first well and a second well defining a p-n junction with the first well, and an interlayer dielectric layer on the semiconductor layer. A deep trench isolation region includes a conductor layer and a dielectric liner. The conductor layer penetrates through the semiconductor layer and the interlayer dielectric layer. The conductor layer has a first end, a second end, and a sidewall that connects the first end to the second end. The dielectric liner is arranged to surround the sidewall of the conductor layer. A metal feature is connected to the first end of the conductor layer.

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Patent Owner(s)

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GLOBALFOUNDRIES SINGAPORE PTE LTDSINGAPORE

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Linardy, Eric Singapore, SG 2 3
Quek, Kiok Boone Elgin Singapore, SG 80 357
Toh, Eng Huat Singapore, SG 256 1730
Zheng, Ping Singapore, SG 74 636

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