Gas injection process kit to eliminate arcing and improve uniform gas distribution for a PVD process
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United States of America
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Dec 31, 2024
Grant Date -
Jun 15, 2023
app pub date -
Feb 13, 2023
filing date -
Feb 13, 2023
priority date (Note) -
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Abstract
Embodiments of process shield for use in process chambers are provided herein. In some embodiments, a process shield for use in a process chamber includes: an annular body having an upper portion and a lower portion extending downward and radially inward from the upper portion, wherein the upper portion includes a plurality of annular trenches on an upper surface thereof and having a plurality of slots disposed therebetween to fluidly couple the plurality of annular trenches, wherein one or more inlets extend from an outer surface of the annular body to an outermost trench of the plurality of annular trenches.
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